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STACISIII是先進(jìn)的主動(dòng)振動(dòng)隔離系統(tǒng)。采用先進(jìn)的慣性振動(dòng)傳感器，復(fù)雜的控制算法，和先進(jìn)的壓電致動(dòng)器。STACIS通過連續(xù)測量地板活動(dòng)、擴(kuò)大和收縮壓電致動(dòng)器過濾地板振動(dòng)來進(jìn)行實(shí)時(shí)隔離振動(dòng)。
*初被設(shè)計(jì)用于先進(jìn)半導(dǎo)體工廠的精密顯微光刻、計(jì)量和檢測設(shè)備的隔振，STACIS現(xiàn)在是嘈雜環(huán)境中敏感儀器的行業(yè)標(biāo)準(zhǔn)解決方案，包括但不局限于半導(dǎo)體晶圓廠、失效分析實(shí)驗(yàn)室、納米技術(shù)研究、納米加工設(shè)備和材料研究。
STACIS III包括一個(gè)新型改進(jìn)的數(shù)字控制器----DC - 2020。它的前后面板上有新型雙核處理器，以太網(wǎng)和USB串口，這個(gè)新型先進(jìn)控制系統(tǒng)為用戶提供了一個(gè)現(xiàn)代的、易于使用的圖形用戶界面(GUI)。
擁有在世界各地的數(shù)百個(gè)成功安裝案例，STACIS對于大部分振動(dòng)敏感儀器來說都是理想的振動(dòng)消除系統(tǒng)。
| Active degrees of freedom | 6 |
| Active bandwidth | 0.6 Hz - 150 Hz |
| Passive natural frequency | 18 Hz vertical and horizontal |
| Effective active resonant frequency | 0.5 Hz |
| Isolation at 1 Hz | 40% - 70% |
| Isolation at ≥2 Hz | ≥90% |
| Settling time after a 10 lb (4.5 kg) step input (10:1 reduction) | 0.3 sec |
| Internal noise | <0.1 nm RMS |
| Operating load range per isolator | Low capacity: 400-1100 lbs (181-499 kg) Med capacity: 900-2100 lbs (408-953 kg) Hi capacity: 1900-4500 lbs (862-2041 kg) |
| Static lift capacity per isolator | 9000 lbs (4090 kg) |
| Stiffness (1000 lb / 454 kg mass， Med capacity isolator) | 40，000 lb/in. (73 x 105 N/m) |
| Magnetic field emitted at maximum 4 in.(102 mm) from the isolator | <0.02 μG broadband RMS |
| Environmental and safety | CE and RoHS compliant |
| Active isolation elements | high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC |
| Passive isolation element | single stiff isotropic elastomer (no compressed air supply required) |
| Vibration sensor elements | downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion |
| Active feedback control loop | Floor vibration is measured， processed and attenuated below the spring supporting the isolated surface |
| Isolator dimensions (WxDxH) | 11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm |
| Isolator weight | 75 lb (34 kg) |
| Operating temperature | 50° - 90° F 10° - 32° C |
| Storage temperature | -40° - 130° F -40° - 55° C |
| Humidity (operating) | 30 - 60% |
| System power requirements | 100， 120， 230， 240 VAC 50/60 Hz AC; <600 w CE compliant |
| Floor displacement | <480 μin. (12 μm) below 10 Hz |
| Isolator count per system | minimum of 3 |
| Options | laminated stainless steel platforms， frames， risers， leveling devices， earthquake restraints， lifthoods |
| Dimensions (WxDxH) | 19 x 8.5 x 1.75 in. 483 x 216 x 45 mm |
| Weight | 6.3 lb (2.9 kg) |
| Processor | 150/75 MHz dual core |
| Sampling rate | 10 kHz |
| Analog outputs | 16 channels |
| Analog inputs | 16 channels |
| Status light | single LED |
| Front panel ports | 1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC |
| Rear panel ports | 1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators |
| User interface | Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI |
4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s， 12.5 μm/s RMS)
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