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激活退火設(shè)備 Ailesic-1500品牌
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產(chǎn)品型號(hào):
Ailesic-1500
產(chǎn)品介紹(Ailesic-1500):
1. Adapt to 1500℃Extra High Temp Processes
-Rapid Heating: ~20℃/min (10℃/minover 1350℃)
-Mass production Capability: ~50 wafers/batch
2. Attain and Maintain Extra Low Metal Cont.
-Extra High Purity All-CVD SiC Wares
-Effective In-situ Cleaning System
3. Extra Low Running Cost
-Long life SiC wares
-Long life Heater
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