參考價(jià)格
面議型號(hào)
碳膜濺射設(shè)備 CS-200品牌
萬(wàn)德思諾產(chǎn)地
天津樣本
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產(chǎn)品圖片:
產(chǎn)品型號(hào):
CS-200
產(chǎn)品介紹:
Dense carbon film for high temp. anneal
Max. Substrate φ200㎜(Transfer tray available)
產(chǎn)品特點(diǎn):
1. Key point for carbon process
- Front(Ion Implantation) and Back(Annealing) processes are well known.
2. Good process experience for CC deposition
- AIST and SIC production company uses ULVAC system.
3. Optional items
- High temp stage, RF stage bias, 3MFC line, DRP, etc.
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