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石墨烯生長(zhǎng)設(shè)備(TCVD) - 配備熱壁石英管和LabVIEW自動(dòng)控制軟件。
技術(shù)規(guī)格如下:
1. 石英管及工藝爐 QUARTZ TUBE & FURNACE
- Tube Dimensions: ф100*1200mm
- Furnace Body (WxHxD): 500x500x350
- Heater: Kanthal Wire w/ Glass Wool Molding
- Maximum Temperature: 1,100°C
- Thermocouple: K type, ID 6.5 mm
- Heating Zone: 1-zone, ф100*350mm
- Linear Motion Control Unit
- Manual Furnace Door
2. 氣路 GAS SUPPLY UNIT
- Three (3) Mass Flow Controllers w/ 1% FS Accuracy
a) Hydrogen (H2), 100sccm
b) Methane (CH4), 200sccm
c) Argon (Ar): 1,000sccm
- Open Mounting Bay for Fourth (4th) MFC
- 0.25” Stainless Steel Tubing
- Five (5) 0.25” Pneumatic-Type Diaphragm Valves
3. 真空及壓力控制 VACUUM & PRESSURE CONTROL UNIT
- Convection Gauge
- Convection Gauge Controller
- 10 Torr Capacitance Manometer
- Motor-Geared Throttle Valve
- Pressure & Flow Controller
- Oil Rotary Pump (340L/M)
4. 系統(tǒng)控制單元 SYSTEM CONTROL UNIT
- MS Windows 7 Embedded PC
- PLC Module with National Inst. LabVIEW Interface
- 19” LCD Monitor
5. 安全及冷卻 SAFETY & COOLING
- Water Cooled End Flanges
- Buzzer Alarm & System Error Display
- Interlock System
6. 設(shè)備尺寸及實(shí)驗(yàn)室要求 DIMENSIONS & UTILITY REQUIREMENTS
- Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
- Weight: ~200kg
- Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
- Air: 4-5kgf/cm2, 0.25” tube
- Water: 2-3kgf/cm2, 0.25” tube
參考用戶:
劍橋大學(xué),牛津大學(xué),曼徹斯特大學(xué),萊斯大學(xué),斯坦福大學(xué),新加坡國(guó)立大學(xué),東京技術(shù)研究所,東京大學(xué),韓國(guó)東國(guó)大學(xué)等...
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